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Combined Surface Treatments to Improve Micro-Tribological Properties of Silicon Surfaces

Authors

Yoon, Eui Sung; Arvind Singh; Pham Duc Cuong; KIM, JINSEOK; Yang Sung Wook

Citation

Society of Tribologists and Lubrication Engineers 63rd Annual Meeting and Exibition

Keywords

MEMS devices; surface modification; coatings

URI

https://pubs.kist.re.kr/handle/201004/102169

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KIST Conference Paper > Others

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