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A novel spiral type MEMS power generator with shear mode piezoelectric thick film

Authors

Song, Hyun - Cheol; Kim Sang Jong; Moon Hi Gyu; KANG, CHONG YUN; YOON, SEOK JIN

Citation

5th International Workshop on Piezoelectric Materials and Applications (IWPMA)

URI

https://pubs.kist.re.kr/handle/201004/102276

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KIST Conference Paper > Others

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