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Characteristic estimation of the formation and etching of PZT thin films for pyroelectric IR sensor application

Title
Characteristic estimation of the formation and etching of PZT thin films for pyroelectric IR sensor application
Authors
박윤권; 주병권; 전호승; 윤영수; 오영제; 이윤희; 서상희; 오명환; 김철주
Keywords
pyroelectric sensor; PZT film; MEMSS; micromachining
Issue Date
1999-07
Publisher
1999년도 대한전기학회 하계학술대회 논문집
Citation
, 3304-3306
URI
https://pubs.kist.re.kr/handle/201004/10249
Appears in Collections:
KIST Publication > Conference Paper
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