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dc.contributor.authorKim, Yong Tae-
dc.contributor.authorYoum Minsoo-
dc.contributor.authorMan Young Sung-
dc.date.accessioned2024-01-13T05:33:35Z-
dc.date.available2024-01-13T05:33:35Z-
dc.date.created2021-09-29-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/103210-
dc.languageEnglish-
dc.titleCrystal structure variation with excess Sb atoms of the δ-region SbTe binary phase change thin films-
dc.typeConference-
dc.description.journalClass1-
dc.identifier.bibliographicCitationAdvanced Semiconductor Processes and Equipments (2007 Korea-Japan Joint Workshop)-
dc.citation.titleAdvanced Semiconductor Processes and Equipments (2007 Korea-Japan Joint Workshop)-
dc.citation.conferencePlaceKO-
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