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Copper Electrodeposition for Semiconductor Interconnection

Other Titles

반도체 금속 배선용 구리 전해 도금

Authors

Soo-Kil Kim; Jae Jeong Kim

Citation

한국전기화학회, pp.13

Keywords

반도체; 금속배선; 구리; 전해도금

URI

https://pubs.kist.re.kr/handle/201004/103283

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KIST Conference Paper > Others

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