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Nanodot Arrays Patterned Using Diblock Copolymer Templates

Authors

Kang Gil Bum; Kim, Seong Il; Kim, Young Hwan; Park, Min Chul; Lee Chang Woo; Kim, Yong Tae

Citation

International Symposium of Electroceramics 2007, pp.35

Keywords

diblock copolymer; copolymer lithography; reactive ion etching; Si nano dot; nanotemplate

URI

https://pubs.kist.re.kr/handle/201004/103477

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KIST Conference Paper > Others

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