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Ultra-High Sensitive PZT Thin Film Cantilever for Femtogram Mass Detection

Authors

Chun Dong Won; Hwang Kyo Seon; 이정훈; Yoon, Dae Sung; 이우영; Kim, Tae Song

Citation

ISIF 2006

Keywords

질량검출; 캔틸레버; PZT

URI

https://pubs.kist.re.kr/handle/201004/103697

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KIST Conference Paper > Others

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