Effect Of Silicon Carbide Passivation Films On The Resonance Characteristics Of Cantilever Sensor

Authors
CHOI KI YONG최덕균최두진Yoon, Dae SungKim, Tae Song
Citation
ISIF 2006
Keywords
SiC; passivation
URI
https://pubs.kist.re.kr/handle/201004/103698
Appears in Collections:
KIST Conference Paper > Others
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