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Low-Temperature Deposition of Nanocrystalline Diamond Film by Plasma-assisted Hot Filament CVD

Authors

Hequing Li; Lee Hak Joo; JONG-KEUK, PARK; Jeung-hyun Jeong; Baik, Young Joon; Lee, Wook Seong

Citation

Materials Research Society 2006 Fall Meeting

Keywords

Nanodiamond; HFCVD; Wafer; grain size; uniformity

URI

https://pubs.kist.re.kr/handle/201004/103982

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KIST Conference Paper > Others

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