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dc.contributor.authorKo, Hyun Chang-
dc.contributor.authorYeo, Yeong-Koo-
dc.contributor.authorLEE, HWA UNG-
dc.contributor.authorSong, Hyung Keun-
dc.date.accessioned2024-01-13T07:03:51Z-
dc.date.available2024-01-13T07:03:51Z-
dc.date.created2021-09-29-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/104033-
dc.subjectRF 마이크로플라즈마-
dc.subject카본-
dc.subject증착-
dc.title.alternativeRF 마이크로플라즈마를 이용한 카본의 증착 및 형태변화에 관한 고찰-
dc.typeConference-
dc.description.journalClass2-
dc.identifier.bibliographicCitation한국화학공학회 춘계학술대회-
dc.citation.title한국화학공학회 춘계학술대회-
dc.citation.conferencePlaceKO-
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