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Electrical properties of ZnO:Al2O3 transparent conductive oxide thin film on polymer substrate

Other Titles

폴리머 기판 위에 형성된 ZnO:Al2O3 투명 전도성 박막의 전기적 특성

Authors

Shin Sang-Hoon; Kim Tae-hoon; Jin Hyuk Kim; Lee, Jeon Kook

Citation

제 29회 한국 진공학회 학술 발표회

Keywords

ZnO:Al2O3; electrical properties; RF Sputtering; Tansparent Conductive Oxide; Polymer substrate

URI

https://pubs.kist.re.kr/handle/201004/104544

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KIST Conference Paper > Others

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