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Fluorine doping effect of ZnO film by RF magnetron sputtering

Other Titles

RF magnetron sputtering을 이용한 ZnO 박막의 F 도핑 효과

Authors

Ku Dae Young; Kim In-ho; 이인규; LEE, KYEONG SEOK; JONG-KEUK, PARK; LEE, TAEK SUNG; Baik, Young Joon; CHEONG, BYUNG KI; KIM, WON MOK

Citation

한국전기전자재료학회, v.5, no.2, pp.1023 - 1028

Keywords

Transparent conducting oxide; doping; sputtering; thin film; RF magnetron sputtering; Fluorine; ZnO

URI

https://pubs.kist.re.kr/handle/201004/104601

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KIST Conference Paper > Others

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