DSpace at KISTKIST Conference PaperOthers

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dc.contributor.authorKIM NA-RI-
dc.contributor.authorKim, Jae Soo-
dc.contributor.author변동진-
dc.contributor.author이재훈-
dc.contributor.author양재웅-
dc.contributor.author노대호-
dc.contributor.author진정근-
dc.date.accessioned2024-01-13T08:30:50Z-
dc.date.available2024-01-13T08:30:50Z-
dc.date.created2021-09-29-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/104611-
dc.languageEnglish-
dc.titleGrowth and characterization of SiC film using single precursors-
dc.title.alternative단일전구체를 이용한 SiC 박막의 성장과 특성평가-
dc.typeConference-
dc.description.journalClass2-
dc.identifier.bibliographicCitation2004년 추계 재료학회, pp.199-
dc.citation.title2004년 추계 재료학회-
dc.citation.startPage199-
dc.citation.endPage199-
dc.citation.conferencePlaceKO-
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