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Piezoelectric thin/thick film driven microcantilever for bio-molecule detection

Authors

이정훈; Yoon, Dae Sung; Kang, Ji Yoon; Kim, Tae Song

Citation

International conference on electroceramics 2005, pp.84 - 85

Keywords

cantilever

URI

https://pubs.kist.re.kr/handle/201004/104638

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KIST Conference Paper > Others

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