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Principal and applications of nanoindentation test

Title
Principal and applications of nanoindentation test
Authors
한준희; 이광렬; 김광석; 이상율
Keywords
nanoindentation; thin film; hardness; elastic modulus; DLC; polyimide; MEMS
Issue Date
2002-03
Publisher
한국정밀공학회지; Journal of the Korean Society of Precision Engineering
Citation
VOL 19, NO 3, 19-26
URI
https://pubs.kist.re.kr/handle/201004/10464
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KIST Publication > Article
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