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Improvement of linearity and Resolution in Capacitive Micro Tilt Sensor by Using Modified Comb Finger Shape

Other Titles

콤 모양의 개선에 의한 정전형 마이크로 틸트센서의 선형성과 해상도 향상

Authors

SON JUN HYUK; SeungHun LEE; Cheung Il Jin; KIM HYUNG WON; Kim, Kwang Ho; Shim, Jae Wan; Shin, Hyun Joon; Sung-Woo Hwang; Moon, Sung Wook

Citation

제7회 한국 MEMS 학술 대회 초록집

URI

https://pubs.kist.re.kr/handle/201004/104645

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KIST Conference Paper > Others

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