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Fabrication process and properties of PZT thick film cantilevers for bio sensing application

Authors

JAE HONG PARK; Kwon Tae-Yun; Yoon, Dae Sung; Kim, Tae Song; 김환

Citation

한국센서학회 종합학술대회, pp.127 - 128

Keywords

thick film; cantilever

URI

https://pubs.kist.re.kr/handle/201004/104655

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KIST Conference Paper > Others

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