DSpace at KISTKIST Conference PaperOthers

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dc.contributor.author노대호-
dc.contributor.authorKim, Jae Soo-
dc.contributor.author변동진-
dc.contributor.author이재훈-
dc.contributor.authorKIM NA-RI-
dc.date.accessioned2024-01-13T08:31:35Z-
dc.date.available2024-01-13T08:31:35Z-
dc.date.created2021-09-29-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/104660-
dc.languageEnglish-
dc.subjectHMDS-
dc.subjectSIC nanowire-
dc.subjectAPCVD-
dc.titleGrowth of SiC nanowire using HMDS and APCVD on Si substrate-
dc.typeConference-
dc.description.journalClass1-
dc.identifier.bibliographicCitationEUROMAT2005-
dc.citation.titleEUROMAT2005-
dc.citation.conferencePlaceGW-
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