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Characteristics of SiC film using Tetramethylsilane

Other Titles

Tetramethylsilane에 의한 SiC 박막의 특성평가

Authors

KIM NA-RI; Kim, Jae Soo; 노대호; 이재훈; Ahn myoung-won; 변동진

Citation

2005년도 한국재료학회 추계학술대회, pp.275

Keywords

Tetramethylsilane; SiC film

URI

https://pubs.kist.re.kr/handle/201004/104668

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KIST Conference Paper > Others

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