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Tetramethylsilane을 이용한 SiC 박막의 성장

Authors

KIM NA-RI; 변동진; 노대호; 양재웅; Ahn myoung-won; 이재훈; Kim, Jae Soo

Issue Date

2005-10

Citation

2005년 대한금속재료학회 추계학술대회, pp.124

Keywords

Tetramethylsilane; SiC film; CVD

URI

https://pubs.kist.re.kr/handle/201004/104676

Appears in Collections:

KIST Conference Paper > Others

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