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Investigation on Hydrogen Ion Implantation for Fabrication of GaAs-on-insulator (GOI) wafer for Optical Devices

Other Titles

광소자용 GOI 웨이퍼 제작을 위한 수소 이온 주입에 관한 연구

Authors

PARK JONG KOOK; Shin Sang Won; Jong-Han Lee; SONG, JONG HAN; Kim, Sun Ho; Jin Woo Park; Byun, Young Tae

Citation

Photonics Conference 2005, pp.187 - 188

Keywords

광소자; GOI 웨이퍼; 수소 이온 주입

URI

https://pubs.kist.re.kr/handle/201004/104806

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KIST Conference Paper > Others

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