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Low temperature tin oxide thin film deposition on plastic substrate by ECR-MOCVD with ion beam assistance

Authors

국윤호; V. Pukha; 변동진; 전법주; Lee, Joong Kee

Citation

ISE2005, pp.716

Keywords

tin oxide; deposition; ECR; MOCVD; ion beam

URI

https://pubs.kist.re.kr/handle/201004/104865

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KIST Conference Paper > Others

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