Full metadata record
DC Field | Value | Language |
---|---|---|
dc.contributor.author | 국윤호 | - |
dc.contributor.author | V. Pukha | - |
dc.contributor.author | 변동진 | - |
dc.contributor.author | 전법주 | - |
dc.contributor.author | Lee, Joong Kee | - |
dc.date.accessioned | 2024-01-13T09:00:40Z | - |
dc.date.available | 2024-01-13T09:00:40Z | - |
dc.date.created | 2021-09-29 | - |
dc.identifier.uri | https://pubs.kist.re.kr/handle/201004/104865 | - |
dc.language | English | - |
dc.subject | tin oxide | - |
dc.subject | deposition | - |
dc.subject | ECR | - |
dc.subject | MOCVD | - |
dc.subject | ion beam | - |
dc.title | Low temperature tin oxide thin film deposition on plastic substrate by ECR-MOCVD with ion beam assistance | - |
dc.type | Conference | - |
dc.description.journalClass | 1 | - |
dc.identifier.bibliographicCitation | ISE2005, pp.716 | - |
dc.citation.title | ISE2005 | - |
dc.citation.startPage | 716 | - |
dc.citation.endPage | 716 | - |
dc.citation.conferencePlace | KO | - |
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