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Photolithographic Fluorescent Patterning in Polymer Films by Dry Process Based on Chemical Amplification

Authors

Ahn, Kwang-Duk; KANG, JONG HEE

Citation

Proceedings RadTech Asia 2005, pp.367 - 370

Keywords

Fluorescent Patterning; Photolithographic imaging; Polymer Films; Polymer having tBOC-quinizarin dye; Chemical Amplification Process

URI

https://pubs.kist.re.kr/handle/201004/104891

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KIST Conference Paper > Others

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