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Electrical properties of screen printed PZT thick films treated with photo-sensitive and diol based sols for cantilever based biochip

Authors

JAE HONG PARK; Jin Ho Son; Yoon, Dae Sung; Kim, Tae Song; Hyung Ho Park; Hwan Kim

Citation

ISIF 2004

Keywords

cantilever; biochip; PZT; thick film; electrical property

URI

https://pubs.kist.re.kr/handle/201004/105446

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KIST Conference Paper > Others

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