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Improvement of W-N films Using WF6 Pulse Plasma Atomic Layer Deposition

Authors

Hyun Sang Sim; Park Ji Ho; Kim, Seong Il; Kim, Yong Tae

Citation

International Conference on Electrical Engineering 2004, v.1, pp.333 - 336

URI

https://pubs.kist.re.kr/handle/201004/105569

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KIST Conference Paper > Others

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