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Variable optical attenuator using parallel plate electrostatic actuator

Authors

Jae Sung Hur; Tae Yeop Kim; In Hoon Choi; Shin, Hyun Joon; Moon, Sung Wook

Citation

The 12th Seoul International Symposium on the Physics of Semiconductors and Applications, pp.112

Keywords

attenuator; actuator; parallel plate

URI

https://pubs.kist.re.kr/handle/201004/105671

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KIST Conference Paper > Others

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