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Deposition of Iridium Oxide Thin Films as Bottom Electrodes of Ferroelectric Capacitors

Authors

Hur Jae Sung; Choi Hoon Sang; Jong-Han Lee; Choi In Hoon; Moon, Sung Wook; Shin, Hyun Joon

Citation

ISAEM 2003 (3rd Inter. Sympo. on Designing, Processing and Properties of Advanced Engineering Materi, pp.243

Keywords

ferroelectric; capacitor; Iridium oxide; electrode

URI

https://pubs.kist.re.kr/handle/201004/105702

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KIST Conference Paper > Others

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