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Effect of Substrate Bias on Structure and Properties of W Incorporated Diamond-like Carbon Films

Authors

Ai Ying Wang; Lee, Kwang Ryeol

Citation

Mat. Res. Soc. Symp. Proc., v.821, pp.P3.22.1 - P3.22.6

Keywords

DLC; hybrid ion beam; stress; structure

URI

https://pubs.kist.re.kr/handle/201004/105803

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KIST Conference Paper > Others

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