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An Study of Influence of Imperfections on the Delamination of Diamond-like Carbon Films

Authors

Myoung Woon Moon; Lee, Kwang Ryeol; 정진원; 오규환

Citation

Mat. Res. Soc. Symposium Proceeding, v.719, pp.F8.36.1 - F8.36.5

Keywords

DLC; Delamination; Chemical vapor deposition (CVD); Defect; FIB

URI

https://pubs.kist.re.kr/handle/201004/105805

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KIST Conference Paper > Others

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