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dc.contributor.author정용철-
dc.contributor.authorAN SE YOUNG-
dc.contributor.authorLee Hak Joon-
dc.contributor.author최덕균-
dc.contributor.authorKIM, JIN SANG-
dc.date.accessioned2024-01-13T10:33:37Z-
dc.date.available2024-01-13T10:33:37Z-
dc.date.created2021-09-29-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/105859-
dc.subject스퍼터링-
dc.subject표면보호막-
dc.subjectSiN-
dc.title.alternative스퍼터링 증착조건이 HgCdTe 표면 보호막으로 사용된 Silicon Nitride 박막의 전기적 특성에 미치는 영향-
dc.typeConference-
dc.description.journalClass2-
dc.identifier.bibliographicCitation제11회 한국반도체 학술대회 논문집, no.2, pp.523 - 524-
dc.citation.title제11회 한국반도체 학술대회 논문집-
dc.citation.number2-
dc.citation.startPage523-
dc.citation.endPage524-
dc.citation.conferencePlaceKO-
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