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Multi-scale simulation of plasma generation and film deposition in a circular type DC magnetron sputtering system

Authors

Ui Hui Kown; Choi, Sun-Hee; Tae Won Seo; Won Jong Lee

Citation

The 4th Asian-European International Conference on Plasma Surface Engineering, pp.184

URI

https://pubs.kist.re.kr/handle/201004/106013

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KIST Conference Paper > Others

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