Full metadata record
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | Kim, Doo In | - |
| dc.contributor.author | Ahn, Hyo-Sok | - |
| dc.date.accessioned | 2024-01-13T11:02:11Z | - |
| dc.date.available | 2024-01-13T11:02:11Z | - |
| dc.date.created | 2021-09-29 | - |
| dc.identifier.uri | https://pubs.kist.re.kr/handle/201004/106032 | - |
| dc.language | English | - |
| dc.subject | microsystem | - |
| dc.subject | humidity | - |
| dc.subject | adsorption layer | - |
| dc.subject | capillary force | - |
| dc.subject | shear stress | - |
| dc.title | Tribological Properties of Adsorbed Water Layer on Silicon Surfaces with Different Hydrophilicity under Various Humid Environments | - |
| dc.type | Conference | - |
| dc.description.journalClass | 1 | - |
| dc.identifier.bibliographicCitation | Int.Conf. on Metallurgical Coatings and thin Films, pp.20 | - |
| dc.citation.title | Int.Conf. on Metallurgical Coatings and thin Films | - |
| dc.citation.startPage | 20 | - |
| dc.citation.endPage | 20 | - |
| dc.citation.conferencePlace | US | - |
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