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Fabrication of 3D MEMS antenna for IR detector using novel UV-lithography, plastic micro machining and mesh structure bonding technique

Authors

JONG-YEON PARK; KIM GEUN TAE; Moon Sung Wook; PARK JEONG HO

Citation

17th European Conference on Solid-State Transducers

Keywords

plastic micromachining; PDMS; 3D MEMS; UV-lithography; mesh structure bonding

URI

https://pubs.kist.re.kr/handle/201004/106088

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KIST Conference Paper > Others

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