Low-energy ion beam treatment of α-Al2O3 (0001) and improvement of photoluminescence of ZnO thin films

Authors
박종용노영수박병진이현우Ji-Won ChoiKIM JIN SANGY. ErmakovYOON SEOK JINOh Young-JeiCHOI, WON-KOOK
Citation
The 7th Korea-China Workshop on Advanced Materials, pp.87 - 92
Keywords
ZnO thin film; Low-energy ion beam; Al2O3; ZnO; Al-O-N; AlN; PL; PLD
URI
https://pubs.kist.re.kr/handle/201004/106121
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KIST Conference Paper > Others
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