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A study on the effect of catalysts to SIC nanowire growth by APCVD using hexamethyldisilane.

Authors

양재웅; 노대호; Byun Dongjin; Kim Jae Soo

Citation

Proceeding of KOCS International Symposium 2003, pp.158 - 161.

Keywords

SiC

URI

https://pubs.kist.re.kr/handle/201004/106167

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KIST Conference Paper > Others

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