KIST Library Institutional Repository

VOA fabrication with symmetric actuator

Other Titles

대칭구동기를 갖는 가변 광 감쇄기의 제작

Authors

김태엽; 허재성; Moon Sung Wook; Shin Hyun Joon; LEE SANG YOUL

Citation

2003 년도 대한전기학회 하계학술대회 논문집, pp.1912 - 1913

Keywords

구동기; 광감쇄기; SOI; DRIE

URI

https://pubs.kist.re.kr/handle/201004/106181

Appears in Collections:

KIST Conference Paper > Others

Files in This Item:

There are no files associated with this item.

Export

RIS (EndNote)

XLS (Excel)

XML