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Preparation of Cu films on polymer substrate by ECR-MOCVD coupled with DC bias at room temperature

Authors

Lee Joong Kee; 고형덕; 현진; Byun Dongjin; Cho Byung Won; Park Dal keun

Citation

203rd The Electrochemical Society, pp.82 - 92

Keywords

Cu films

URI

https://pubs.kist.re.kr/handle/201004/106283

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KIST Conference Paper > Others

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