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Fabrication of 3D MEMS antenna array for infrared detector using novel UV-lithography apparatus, plastic micro machining and micro assembly technique

Authors

JONG-YEON PARK; KIM GEUN TAE; Moon Sung Wook; PARK JEONG HO

Citation

Nanotech 2003

Keywords

3D MEMS antenna; antenna; lithography; bonding; plastic micromachining

URI

https://pubs.kist.re.kr/handle/201004/106482

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KIST Conference Paper > Others

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