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Biological element detection sensor application of micromachined PZT thick film cantilever

Authors

KIM HYUNG JOON; Yong-Bum Kim; Jaebum Park; Kim, Tae Song

Citation

IEEE Sensors 2003, Book of Abstracts, pp.353 - 354

Keywords

thick film; PZT; cantilever; biochip

URI

https://pubs.kist.re.kr/handle/201004/106590

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KIST Conference Paper > Others

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