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Characteristics of Cu/C films on polymer substrate prepared by room temperature ECR-MOCVD coupled with periodic DC bias.

Authors

Lee Joong Kee; 고형덕; 현진; Byun Dongjin; Cho Byung Won; Park Dal keun

Citation

Mat. Res. Soc. Symp. Proc., v.v. 734, pp.B9.49.1 - B9.49.6.

Keywords

Cu/C film

URI

https://pubs.kist.re.kr/handle/201004/106620

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KIST Conference Paper > Others

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