Full metadata record
DC Field | Value | Language |
---|---|---|
dc.contributor.author | Lee Joong Kee | - |
dc.contributor.author | 고형덕 | - |
dc.contributor.author | 현진 | - |
dc.contributor.author | Byun Dongjin | - |
dc.contributor.author | Cho Byung Won | - |
dc.contributor.author | Park Dal keun | - |
dc.date.accessioned | 2024-01-13T12:03:05Z | - |
dc.date.available | 2024-01-13T12:03:05Z | - |
dc.date.created | 2021-09-29 | - |
dc.identifier.uri | https://pubs.kist.re.kr/handle/201004/106620 | - |
dc.language | English | - |
dc.subject | Cu/C film | - |
dc.title | Characteristics of Cu/C films on polymer substrate prepared by room temperature ECR-MOCVD coupled with periodic DC bias. | - |
dc.type | Conference | - |
dc.description.journalClass | 1 | - |
dc.identifier.bibliographicCitation | Mat. Res. Soc. Symp. Proc., v.v. 734, pp.B9.49.1 - B9.49.6. | - |
dc.citation.title | Mat. Res. Soc. Symp. Proc. | - |
dc.citation.volume | v. 734 | - |
dc.citation.startPage | B9.49.1 | - |
dc.citation.endPage | B9.49.6. | - |
dc.citation.conferencePlace | US | - |
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