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dc.contributor.authorLee Joong Kee-
dc.contributor.author고형덕-
dc.contributor.author현진-
dc.contributor.authorByun Dongjin-
dc.contributor.authorCho Byung Won-
dc.contributor.authorPark Dal keun-
dc.date.accessioned2024-01-13T12:03:05Z-
dc.date.available2024-01-13T12:03:05Z-
dc.date.created2021-09-29-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/106620-
dc.languageEnglish-
dc.subjectCu/C film-
dc.titleCharacteristics of Cu/C films on polymer substrate prepared by room temperature ECR-MOCVD coupled with periodic DC bias.-
dc.typeConference-
dc.description.journalClass1-
dc.identifier.bibliographicCitationMat. Res. Soc. Symp. Proc., v.v. 734, pp.B9.49.1 - B9.49.6.-
dc.citation.titleMat. Res. Soc. Symp. Proc.-
dc.citation.volumev. 734-
dc.citation.startPageB9.49.1-
dc.citation.endPageB9.49.6.-
dc.citation.conferencePlaceUS-
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