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Hybrid microassembly system for three-dimensional MEMS components

Authors

KIM KYUNG HWAN; KIM DEOK HO; SEOK JOO YI; 이재훈

Citation

Proceedings of 2002 Int'l Workshop on Microfactory, pp.21 - 24

Keywords

hybrid; microassembly; MEMS; micromanipulation

URI

https://pubs.kist.re.kr/handle/201004/106664

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KIST Conference Paper > Others

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