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Influence of structural properties on RF and microwave characteristics of BaSrTiO ₃ films on various substrates.

Authors

S.F. Karmanenko; A.I. Dekyk; N.N. Isakov; Oh Young-Jei; V.I. Sakharov; I.T. Serenkov

Citation

Proceedings of the 14th International Symposium on Integrated Ferroelectrics

Keywords

RF reactive sputtering; Ion scattering; Structual strains; Cavity

URI

https://pubs.kist.re.kr/handle/201004/106779

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