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Fabrication of 3D MEMS antenna array structure for uncooled IR sensor using MRPBI system and plastic micromachining

Authors

JONG-YEON PARK; Kun-Tae Kim; 이준섭; LEE TAE HUN; Kwon Gwang Min; Shin Hyun Joon; Moon Sung Wook; PARK JEONG HO

Citation

Proceedings of ICEE, pp.1444 - 1448

Keywords

MRPBI system; UV-lithography; IR sensor; 3D MEMS antenna

URI

https://pubs.kist.re.kr/handle/201004/106786

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KIST Conference Paper > Others

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