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Fabrication of high-aspect-ratio in-plane actuator using UV-LIGA process

Other Titles

UV-LIGA 공정을 이용한 고형상비 In-plan 구동기의 제작

Authors

김종용; 채경수; 정대석; 김태엽; Moon Sung Wook; 이종철

Citation

제4회 한국 MEMS 학술대회 초록집 = The 4th Korean MEMS Conference, pp.58 - 62

Keywords

MEMS; UV-LIGA; nickel; optical switch

URI

https://pubs.kist.re.kr/handle/201004/106966

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KIST Conference Paper > Others

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