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SOI 웨이퍼를 이용한 압전박막 공진기의 설계 및 제작

Other Titles

Monolithic film bulk acoustic wave resonator using SOI wafer

Authors

KIM IN TAY; 박윤권; 이시형; LEE YUN HI; Lee Jeon Kook; 김남수; Ju Byeong Kwon

Citation

제 4 회 한국 MEMS 학술대회초록집, pp.250 - 255

Keywords

FBAR

URI

https://pubs.kist.re.kr/handle/201004/106971

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KIST Conference Paper > Others

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