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Abatement of CF₄with dielectric barrier discharges at atmospheric pressure

Other Titles

대기압에서 배리어 방전을 이용한 CF₄의 제거

Authors

이광식; YEO YEONG KOO; CHOI JAE WOOK; LEE HWA UNG; Song Hyung Keun; NA BYUNG KI

Citation

화학공학의 이론과 응용 (2002 년 화공학회 춘계학술발표회 ) = Theories and Applications of Ch, v.8, no.1, pp.1597 - 1600

Keywords

PFC; 배리어 방전; Abatement; CF4; dielectric barrier discharge

URI

https://pubs.kist.re.kr/handle/201004/107067

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KIST Conference Paper > Others

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