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Implementation of a self-sensing MEMS cantilever for nanomanipulation

Other Titles

자기 검지식 MEMS 캔티레버를 이용한 나노매니퓰레이터 구현

Authors

KIM DEOK HO; KIM KYUNG HWAN; 홍재완

Citation

제 4 회 MEMS 학술대회 논문집 = The 4th Korean MEMS Conference, pp.120 - 125

Keywords

atomic force microscope(AFM); self-sensing; MEMS; cantilever; nanomanipulation; piezoresistive

URI

https://pubs.kist.re.kr/handle/201004/107094

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KIST Conference Paper > Others

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