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Application of MEMS technology to actuators

Other Titles

MEMS 기술의 엑츄에이터 응용

Authors

Moon Sung Wook; 김종용; Shin Hyun Joon

Citation

대한설비공학회, pp.159 - 166

Keywords

MEMS; actuator

URI

https://pubs.kist.re.kr/handle/201004/107271

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KIST Conference Paper > Others

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